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Reclaim and repeat of material of clean room bad news use
From;  Author:Stand originally
Normally, capital construction cost and labor expenses are controlling most and clean room to make the management cost of the process. In semiconductor manufacturing industry, especially capital construction cost increases on a lot of costs tremendous but the technological equipment cost that rapid ageing, need is updated often or replaces again, it is the biggest brushstroke fee apparently. However, the charge of bad news material also can make main pay sometimes take dominant place even, it is the material that expends in production product process. In semiconductor manufacturing industry, bad news material includes to exceed clean water, craft to use fluid of glue of CMP of glue of gas, photoetching, dishcloth and glove. Can think, except the glove, costly CMP glue fluid is the CMP owner is the highest share in the hand. The worker of clean room manufactory wears semiconductor glove, protective product is avoided in the operation get pollution, in also protecting him worker to avoid the chemical product that is being used in semiconductor technology at exposing at the same time. These gloves are one-time more, after giving out, desertioned. Workers pay new glove on the belt every time, because all sorts of reason gloves are final,meet by pick off. Workers every time relief basically should use 4 assistant to cover, every time relief expenditure is everybody about one dollar left and right sides. The whole world shares one conductor worker, one-time clean room glove was cost years probably ten dollars. Represent the costliest bad news capable person of semiconductor manufacturer normally, not be the article that is used to technology product directly partly then or material however. The glove of one-time clean room with the resistance of nitrile and the most commonly used intensity is made by nitrile. Nitrile polymer includes 3 part: Propylene nitrile, butadiene and hydroxyl are acerbity. Propylene nitrile is offerred oily to hydrocarbon, adipose the resistance with solvent; Butadiene offers the character of similar balata to finished product glove; Hydroxyl acid increases fight Zhang Jiang is spent and anti-corrosive, fight have strength. Last pace is to adorn nitrile glove, enter clean room from clad area next. Nitrile glove can wear outer garment glove above, can adorn before moving toward clad area from outside and adorn in clad process, perhaps be to change next appearance gloves merely, the both hands that direct Dai Zailuo wears go up and do not have any gasket. Below a kind of any circumstances, once nitrile glove is used hind desertion. What semiconductor industry needs truly is the practical process of a kind of economy, changeover has been used, glove of nitrile of forsaken clean room, become a kind of useful by-product, or valuable, but the resource ─ ─ of recycle the addition that the result of the recycle to the glove is semiconductor worker income, bury the expenditure that deal with with avoiding the waste of these gloves and rubbish to fill. Use forsaken glove to serve as raw material, making new nitrile glove is apparently feasible, catharsis uses the glove reoccupy that pass. Two kinds of choices had not been carried out now; Without doubt, as a result of,be obvious economic reason. Fluid of glue of repeated usage CMP is more urgent economy need, be opposite because of the CMP that operates as use copper especially the use growth of more newer, costly glue fluid, and predict brittle, low permittivity coating can produce medium demand grow in prospective semiconductor. The loop of fluid of very glad glue gets paying close attention to again. Bibliographical reference 1 report of has used glue liquid " second birth " , of expression with common glue fluid, this article cite is patent 1997, mix up is mixed with what pass fresh glue juice " saved greatly " the dosage of new gum fluid, function and fluid of 100% new gum are same at the same time. In addition, international semiconductor technology developed a report to predict 2001, the task that their problem is recycle of fluid of development CMP glue will enter appraisal this year, beforehand stage of production. Material of repeated usage bad news, is not to abandon they, offerred pair of winning case ─ ─ while this industry is reducing cost, be more protective green environment offerred another way.

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